Entegris flow meters and controllers

Entegris flow meters provide simultaneous measurement of outlet pressure and flow rate, allowing for greater control of process variables. Some of the benefits include:

• No moving parts to generate particles
• Nonmetallic sensing technology for reliable measurement
• Integral pressure transducer for additional process information
• Flow-through design to minimizes dead volume
• 1% full scale accuracy for critical measurements
• Easy installation in any orientation

Entegris Flow Controllers offer precise point-of-use chemical flow control and are designed for point-of-use blending and dispense applications. Some of the benefits include:

• Most accurate in bubble prone media vs. other commonly used technologies
• Integral pressure transducer for simultaneous dual output – flow and pressure
• Compact footprint for space savings and easy installation
• High repeatability for superior process control
• Fast response for accurate dispense rates
• LED status and discrete alarm output