Entegris PFA tubing

We offer ultrapure PFA tubing for use in highly corrosive environments and where resistance to certain specialized developers containing surfactants is required.

• Compliant to SEMI Standard F57-0314, the specification for polymer components used in ultrapure water and liquid chemical distribution systems (Note: UMT 3M 6502UHP tubing is still undergoing qualification)
• Made from high purity PFA material to provide the lowest extractable ionic and organic levels
• An optional ultraclean (UC) extrusion process yields tubing with the lowest total metal extractables and least amount of surface contamination
• Permanently laser marked to allow 100% lot traceability to a specific material lot, production date and production inspection record; custom laser marking is available