InVue GV148 Concentration Monitors

Delivers real-time process fluid concentration measurements for chemical blending, spiking, and dilution without process intrusion or interruption.

Uses index of Refection for measurement of CMP slurries and nonconductive fluids such as H2O2
Small footprint with integral electronics minimizes tool size
HMI software enables real-time data logging, analysis, and customization
Window cleaning port provides easy access to sapphire window for cleaning

Applications

Proprietary additive blending	Batch tool chemical blending
Global and local loop monitoring	Bath lifetime detection
Slurry dilution	Post-CMP clean chemical blending
H2O2 spiking in slurry

Technical Specifications

Sensor materials of construction_	Flow cell body	Polytetrafluoroethylene (PTFE)*
	Optical window	Single-crystal sapphire*
	Cable jacket	Polyvinylchloride (PVC)
	Bonnet, enclosure	Polyvinylidene fluoride (PVDF)
	Mounting plate	Polypropylene (PP)
Electrical___________________	Cable connection	19 pin Turck male
	Current rating	1.0 A at start-up; 0.5 A during operation
	Main voltage input	24 VDC
	IO voltage input	12 - 24 VDC
	Short protection	Yes
	Extrenal LEDs	4
	Analog outputs	4-20mA concentration, fluid temperature, refractive index (
	Discrete Digital inputs	2
	Discrete digital outputs	2, 80 mAdc maximum (each)
	Re-Zero	Digital input, serial command or MMI software

Serial communication ___________	RS485	2-wire or 4-wire
	RS422	4-wire
	Operating system compatibility	Windows® 7 or 10
	Network compatible	Yes
Pressure and thermal___________	Maximum pressure	80 psig at 40°C (104°F)
	Process fluid temperature range	20° to 40°C (68° to 104°F)
	Ambient temperature range	20° to 35°C (68° to 95°F)
	Storage temperature range	-15° to 40°C (5° to 104°F)
RI Measurement_______________	RI range**	1.32 - 1.40 nD
	Accuracy	±2 x 10-4 nD (@ 20°C [68°F] from 1.332987 to 1.4000 nD)
	Repeatability	5 x 10-5 nD (in clear fluid @ 30°C [68°F])
	Precision	3 x 10-6 nD (in DI water (@ 20°C [68°F])
	Response time	<3 sec unaveraged response to 63% of steady state change
	Drift	<5 x 10-5 nD/30 days @ 20°C (68°F)
	Pressure sensitivity (typical)	8 x 10-7 nD/psig in DI water @ 20°C (68°F)

ROHS compliant_________________	Yes
Enclosure______________________	IP54
Orientation_____________________	Any
Software_______________________	Windows-based interface for user setup, calibration, monitoring and data System Requirements: Windows 7 or 10, 26GB RAM Current software version HMI Server for use with GV148HMI-S1003.exe application

*Wetted components
**For fluids with a refractive index outside this range, please contact Entegris.