Mask and Reticle Handling
Reticle SMIF Pods
A broad array of products for mask and reticle handling. Offering products engineered to provide secure mask protection and precise automation interface, increasing yields, and minimizing unscheduled downtime.
Multiple Reticle Pods
Reticle SMIF pods designed to protect, store and transport valuable lithography reticles.
Single Reticle Pods
The 150 mm single reticle pod is an advanced reticle handling system providing superior performance during storage and transport.
