EB1 Nano-UHV
Small Single Hearth Evaporator EB1Nano-UHV
The small 4kW evaporator with max. 4 cm³ crucible volume is equipped with a permanent magnet system for the primary deflection as well as an electromagnetic coil system for the two-dimensional, dynamic deflection of the electron beam. The ISO63CF mounting flange incorporates all media feedthroughs like high voltage, magnet current and water.
Specifications
- Max. Operating power 4 kW
- High voltage range 6-8 kV
- Coil deflection current (x/y) +/-2 A
- Mounting ISO63K or ISO63CF
- Crucible volume 1 x 4 cm³