EBL6-xxx-UHV
Linear Multi Hearth Evaporator EBL6-xxx-UHV
The linear UHV multi hearth evaporator EBL6-UHV enables evaporation of up to 6 different materials without breaking vacuum. All utilities are installed on a horizontally mounted ISO160CF flange.
Specifications
- Max. Operating power 6 kW
- High voltage range 5 – 10 kV
- Coil deflection current (x/y) +/- 1 A
- Mounting ISO160CF / ISO200CF incl. HV, magnet, water, and shutter feedthrough
- Pocket rotation manual (motorised optional)
Typical standard crucible volumes
- 5 x 4 cm³ (-504) 7 x 4 cm³ (-704)
- 4 x 7 cm³ (-407) 6 x 7 cm³ (-607)
- 3 x 15 cm³ (-315) 4 x 15 cm³ (-415)