Detectors
PM100
The PM100/140 Series detectors are used to measure a single fixed wavelength in the range of 185–830nm. When used with Verity’s system controllers, the PM100/140 Series provides robust endpoint detection when used in the appropriate applications.
PM140
The PM100/140 Series detectors are used to measure a single fixed wavelength in the range of 185–830nm. When used with Verity’s system controllers, the PM100/140 Series provides robust endpoint detection when used in the appropriate applications. This series is most commonly used in applications where the chemistry is simple enough that a fixed 10nm bandpass detector is suitable.
PM220
he PM220/225 Series detectors are used to measure two fixed wavelengths in the range of 185–830nm. When used with Verity’s system controllers, the PM220/225 Series provides robust endpoint detection in appropriate applications.
PM225
The PM220/225 Series detectors are used to measure two fixed wavelengths in the range of 185–830nm. When used with Verity’s system controllers, the PM220/225 Series provides robust endpoint detection in appropriate applications. This series is most commonly used in applications where the chemistry is simple enough that overlapping spectra allow the use of a 10nm bandpass filter — but where two signals are necessary to ensure endpoint, or where two wavelengths are useful for alternative process recipes.
