SD1024 GH/GL/GM High Performance Spectrometers

The SD1024G was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024G include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the image plane of the two-dimensional detector array.

• High performance
• Provides robust endpoint determination
• Can be used with existing SpectraView™ software
• Use for endpoint detection, fault detection, and process diagnostics
• 200 – 800 nm or 200 – 900 nm range
• For demanding applications
• Single or multi-fiber input
• Scientific grade CCD
• Low systematic noise
• Similar optics as SD1024F
• RoHS Compliant

The SD1024GH incorporates special high throughput optics and lower systematic noise as compared to the SD1024G. The optics used in the SD1024GH increase optical throughput by about 75%. The SD1024GH is recommended for applications that require maximum signal to noise, especially when measuring relatively low intensity signals.

• Provides robust endpoint determination
• Can be used with existing SpectraView™ software
• Use for endpoint detection, fault detection, and process diagnostics
• 200 – 800 nm range
• For the most demanding applications
• Same as SD1024G, except:
  • Higher throughput optics
  • Lower systematic noise
• RoHS Compliant

The SD1024GL uses a general purpose CCD and was designed for general purpose semiconductor process applications.

• Provides robust endpoint determination
• Can be used with existing SpectraView™ software
• Use for endpoint detection, fault detection, and process diagnostics
• 200 – 800 nm range
• For general purpose applications
• RoHS Compliant

The SD1024GM is similar to the SD1024G. However, it uses a 2048 element mid-grade CCD. Since the CCD is 2 dimensional the SD1024GM can support multi fiber applications.

• For high resolution applications
• Single or multi-fiber input
• Mid-grade not TE cooled CCD
• Same optics as SD1024G
• 200 -800 nm or 200 – 900 nm range